High quality factor etchless silicon photonic ring resonators

Opt Express. 2011 Mar 28;19(7):6284-9. doi: 10.1364/OE.19.006284.

Abstract

We demonstrate high quality factor etchless silicon photonic ring resonators fabricated by selective thermal oxidation of silicon without the silicon layer being exposed to any plasma etching throughout the fabrication process. We achieve a high intrinsic quality factor of 510,000 in 50 µm-radius ring resonators, corresponding to a ring loss of 0.8 dB/cm. The device has a total chip insertion loss of 2.5 dB, achieved by designing etchless silicon inverse nanotapers at both the input and output of the chip.

Publication types

  • Research Support, Non-U.S. Gov't
  • Research Support, U.S. Gov't, Non-P.H.S.

MeSH terms

  • Equipment Design
  • Equipment Failure Analysis
  • Nanotechnology / instrumentation*
  • Optical Devices*
  • Silicon / chemistry*
  • Surface Plasmon Resonance / instrumentation*
  • Transducers*

Substances

  • Silicon