Directed fracture for the fabrication of free-standing multilayered submicrometer structures
Small
.
2011 Mar 7;7(5):558-62.
doi: 10.1002/smll.201001105.
Epub 2011 Jan 24.
Authors
Roberto R Robaina
1
,
María José López-Martínez
,
Jaume Esteve
,
Raquel Perez-Castillejos
,
José Antonio Plaza
Affiliation
1
Institut de Microelectrònica de Barcelona, IMB-CNM (CSIC), Campus UAB, 08193 Cerdanyola, Barcelona, Spain.
PMID:
21370454
DOI:
10.1002/smll.201001105
No abstract available
Publication types
Research Support, Non-U.S. Gov't
MeSH terms
Microscopy, Electron, Scanning
Nanostructures / chemistry*
Nanostructures / ultrastructure*
Polymers / chemistry
Substances
Polymers