An inorganic-organic diblock copolymer photoresist for direct mesoporous SiCN ceramic patterns via photolithography

Chem Commun (Camb). 2011 Mar 28;47(12):3484-6. doi: 10.1039/c0cc05836j. Epub 2011 Feb 11.

Abstract

A high resolution negative-tone-type of inorganic-organic diblock copolymer photoresist was synthesized as a novel precursor for simple and direct fabrication of SiCN ceramic mesoporous patterns with ordered nanoscale pores by using a "top-down" photolithographic technique and the subsequent sacrificial processes of a "bottom-up" self-assembled nanostructure.

Publication types

  • Research Support, Non-U.S. Gov't

MeSH terms

  • Ceramics / chemistry*
  • Cyanides / chemistry*
  • Light*
  • Organic Chemicals / chemistry*
  • Polymers / chemistry*
  • Porosity
  • Printing*
  • Silicon Compounds / chemistry*

Substances

  • Cyanides
  • Organic Chemicals
  • Polymers
  • Silicon Compounds