Heated probes are used to modify the surface of polymeric thin films by thermomechanical indentation and local evaporation of material. The resolution of the processes is discussed for probe-storage and surface patterning-applications. As storage densities exceed 1 Tbit/in2, the depth of the indents becomes comparable to the natural surface roughness of the polymer. By templating an atomically flat surface this limitation can be overcome, enabling storage densities of up to 4 Tbit/in2, corresponding to an indentation half-pitch of 7.5 nm.