Reduction of reflection is of great importance in optical spectroscopy to reduce interference and increase throughput. Here we demonstrate a three-dimensional inverted photonic grating device design using only one material-silicon. Enhanced transmission compared to planar silicon wafers is observed from 0.2 THz to over 7.3 THz for a device with a 15 µm period, which covers most of the terahertz band, and its relative 3 dB bandwidth (δf/f(c)) is a noteworthy 116.3%. Moreover, the device is polarization independent and can perform up to a large incident angle.