Design and characterization of 2.45 GHz electron cyclotron resonance plasma source with magnetron magnetic field configuration for high flux of hyperthermal neutral beam

Seong Bong Kim; Dae Chul Kim; Won Namkung; Moohyun Cho; Suk Jae Yoo

doi:10.1063/1.3477998

Design and characterization of 2.45 GHz electron cyclotron resonance plasma source with magnetron magnetic field configuration for high flux of hyperthermal neutral beam

Rev Sci Instrum. 2010 Aug;81(8):083301. doi: 10.1063/1.3477998.

Authors

Seong Bong Kim¹, Dae Chul Kim, Won Namkung, Moohyun Cho, Suk Jae Yoo

Affiliation

¹ Department of Physics, Pohang University of Science and Technology, San 31, Hyoja-dong, Nam-gu, Pohang 790-784, Republic of Korea.

PMID: 20815600
DOI: 10.1063/1.3477998

Abstract

A 2.45 GHz electron cyclotron resonance (ECR) source with a magnetron magnetic field configuration was developed to meet the demand of a hyperthermal neutral beam (HNB) flux on a substrate of more than 1x10(15) cm(-2) s(-1) for industrial applications. The parameters of the operating pressure, ion density, electron temperature, and distance between the neutralization plate and the substrate for the HNB source are specified in a theoretical analysis. The electron temperature and the ion density are measured to characterize the ECR HNB source using a Langmuir probe and optical emission spectroscopy. The parameters of the ECR HNB source are in good agreement with the theoretically specified parameters.