High-speed spatial atomic-layer deposition of aluminum oxide layers for solar cell passivation

Adv Mater. 2010 Aug 24;22(32):3564-7. doi: 10.1002/adma.201000766.
No abstract available

MeSH terms

  • Aluminum Oxide / chemistry*
  • Electric Power Supplies
  • Silicon / chemistry
  • Solar Energy
  • Surface Properties

Substances

  • Aluminum Oxide
  • Silicon