Annealing of micro-structured lithium niobate substrates at temperatures close to, but below the melting point, allows surface tension to reshape preferentially melted surface zones of the crystal. The reshaped surface re-crystallizes upon cooling to form a single crystal again as it is seeded by the bulk which remains solid throughout the process. This procedure yields ultra-smooth single crystal superstructures suitable for the fabrication of photonic micro-components with low scattering loss.