TEM characterization of the artefacts induced by FIB in austenitic stainless steel

J Microsc. 2010 Mar;237(3):439-42. doi: 10.1111/j.1365-2818.2009.03288.x.

Abstract

Transmission electron microscopy studies of the artefacts in the form of network of dislocations induced by focused ion beam technique in austenitic stainless steel have been performed. Images of the microstructure with different diffraction vector g were analyzed. Transmission electron microscopy investigations of the artefacts induced by focused ion beam machining in the austenite revealed set of parallel dislocations with edge character located near the free surface of the thin foils.

Publication types

  • Research Support, Non-U.S. Gov't