TiN and TiO(2) coatings, which are known from their low chemical reactivity, high hardness and wear and corrosion resistance, are used for protecting the NiTi surface. In the present work, nearly equiatomic NiTi (50.6 at.%) shape memory alloy was covered with the layers obtained by nitriding under glow discharge at 1073 K. Additionally, at the end of the process some amount of oxygen was added. Characterization of the nitrided/oxided layers structure was carried out using transmission and scanning electron microscopy. The investigations were focused on the structure of the multilayer nitrided/oxided NiTi surface. The surface is formed from nanocrystalline and columnar grains of the TiN phase. Between the top layer and beta-NiTi substrate the interface Ti(2)Ni layer was formed. Addition of oxygen at the end of the process created a thin layer of TiO(2) phase nanograins at the surface of the TiN phase. In the same areas, small amount of amorphous phase was identified. The combination of nitriding and oxidation formed layers that reveal relatively high corrosion resistance.