Aberration-induced intensity imbalance of alternating phase-shifting mask in lithographic imaging

Opt Lett. 2010 May 1;35(9):1404-6. doi: 10.1364/OL.35.001404.

Abstract

We discuss the aberration-induced intensity imbalance of alternating phase-shifting mask (Alt-PSM) in lithographic imaging, in contrast to numerous studies on mask-induced intensity imbalance. Based on the Hopkins theory of partial coherent imaging, a linear relationship between the intensity difference of adjacent peaks in an Alt-PSM image and even aberration is established by formulations and verified by numerical results. The application of the linear relationship is briefly discussed.