Polymeric waveguides with embedded micro-mirrors formed by Metallic Hard Mold

Opt Express. 2010 Jan 4;18(1):378-85. doi: 10.1364/OE.18.000378.

Abstract

In this paper, we presented fabrication of nickel based metal mold with 45 degrees tilted surfaces on both ends of the channel waveguide through electroplating process. To obtain a precise 45 degrees tilted angle, a 50microm thick SU-8 layer was UV exposed under de-ionized water, with repeatable error control of 0.5 degrees . The polymeric waveguide array with 45 degrees micro-mirrors, which is formed by a UV imprinting method with the fabricated metallic mold, shows total insertion losses around 4dB, propagation loss around 0.18dB/cm and 75% coupling efficiency.

Publication types

  • Research Support, U.S. Gov't, Non-P.H.S.

MeSH terms

  • Computer-Aided Design
  • Epoxy Compounds / chemistry*
  • Equipment Design
  • Equipment Failure Analysis
  • Lenses*
  • Miniaturization
  • Nickel / chemistry*
  • Optical Devices*
  • Polymers / chemistry*
  • Refractometry / instrumentation*
  • Reproducibility of Results
  • Sensitivity and Specificity
  • Surface Properties
  • Transducers*

Substances

  • Epoxy Compounds
  • Polymers
  • SU-8 compound
  • Nickel