Step-and-repeat process for thermal nanoimprint lithography

Nanotechnology. 2010 Mar 12;21(10):105302. doi: 10.1088/0957-4484/21/10/105302. Epub 2010 Feb 15.

Abstract

We present a step-and-repeat process for thermal nanoimprint lithography. For the selective heating and imprinting, a spin-coated polystyrene layer is exposed to infra-red rays from a halogen lamp (intensity approximately 500 W) with a metal-covered glass while pressed with a transparent polymer mold (Young's modulus approximately 300 MPa) under a pressure of approximately 4 bar for 60-120 s. During imprinting, the non-irradiated region is protected by a metal screen and a heat sink consisting of a copper block at the bottom which prevents the pattern collapse by lateral heat conduction from the irradiated region.

Publication types

  • Research Support, Non-U.S. Gov't

MeSH terms

  • Infrared Rays
  • Membranes, Artificial*
  • Microscopy, Electron, Scanning
  • Models, Theoretical
  • Nanotechnology / methods*
  • Polymers / chemistry*
  • Polystyrenes / chemistry*
  • Printing / methods*
  • Temperature

Substances

  • Membranes, Artificial
  • Polymers
  • Polystyrenes