The formation and surface structure of pentafluorobenzenethiol (PFBT) self-assembled monolayers (SAMs) on Au(111) formed under various experimental conditions were examined by means of scanning tunneling microscopy (STM). Although it is well known that PFBT molecules on metal surfaces do not form ordered SAMs, we clearly revealed for the first time that the adsorption of PFBT on Au(111) at 75 degrees C for 2 h yields long-range, well-ordered self-assembled monolayers having a (2 x 5 square root(13))R30 degrees superlattice. Our results will provide new insight into controlling the structural order of PFBT SAMs, which will be very useful in precisely tailoring the interface properties of metal surfaces in electronic devices.