Note: Anodic bonding with cooling of heat-sensitive areas

Rev Sci Instrum. 2010 Jan;81(1):016111. doi: 10.1063/1.3277117.

Abstract

Anodic bonding of silicon to glass always involves heating the glass and device to high temperatures so that cations become mobile in the electric field. We present a simple way of bonding thin silicon samples to borosilicate glass by means of heating from the glass side while locally cooling heat-sensitive areas from the silicon side. Despite the high thermal conductivity of silicon, this method allows a strong anodic bond to form just millimeters away from areas essentially at room temperature.