Electrical interfacing between neurons and electronics via vertically integrated sub-4 microm-diameter silicon probe arrays fabricated by vapor-liquid-solid growth

Abstract

We report here a technique for use in electrical interfaces between neurons and microelectronics, using vertically integrated silicon probe arrays with diameters of 2-3.5 microm and lengths of 60-120 microm. Silicon probe arrays can be fabricated by selective vapor-liquid-solid (VLS) growth. A doped n-type silicon probe with the resistance of 1 k Omega has an electrical impedance of less than 10 M Omega in physiological saline. After inserting the probe arrays into the retina of a carp (Cyrpinus carpio), we conducted electrical recording of neural signals, using the probes to measure light-evoked electrical neural signals. We determined that recorded signals represented local field potentials of the retina (electroretinogram (ERG)). The VLS-probe can provide minimally invasive neural recording/stimulation capabilities at high spatial resolution for fundamental studies of nervous systems. In addition, the probe arrays can be integrated with microelectronics; therefore, these probes make it possible to construct interfaces between neurons and microelectronics in advanced neuroscience applications.