Localized heating on silicon field effect transistors: device fabrication and temperature measurements in fluid

Lab Chip. 2009 Oct 7;9(19):2789-95. doi: 10.1039/b906048k. Epub 2009 Aug 6.

Abstract

We demonstrate electrically addressable localized heating in fluid at the dielectric surface of silicon-on-insulator field-effect transistors via radio-frequency Joule heating of mobile ions in the Debye layer. Measurement of fluid temperatures in close vicinity to surfaces poses a challenge due to the localized nature of the temperature profile. To address this, we developed a localized thermometry technique based on the fluorescence decay rate of covalently attached fluorophores to extract the temperature within 2 nm of any oxide surface. We demonstrate precise spatial control of voltage dependent temperature profiles on the transistor surfaces. Our results introduce a new dimension to present sensing systems by enabling dual purpose silicon transistor-heaters that serve both as field effect sensors as well as temperature controllers that could perform localized bio-chemical reactions in Lab on Chip applications.

Publication types

  • Research Support, N.I.H., Extramural
  • Research Support, U.S. Gov't, Non-P.H.S.

MeSH terms

  • Fluorescent Dyes / chemistry
  • Hot Temperature*
  • Lab-On-A-Chip Devices
  • Microwaves
  • Silicon / chemistry*
  • Surface Properties
  • Transistors, Electronic*

Substances

  • Fluorescent Dyes
  • Silicon