Silicon-on-insulator guided mode resonant grating for evanescent field molecular sensing

Opt Express. 2009 Sep 28;17(20):18371-80. doi: 10.1364/OE.17.018371.

Abstract

We present experimental and theoretical results of label-free molecular sensing using the transverse magnetic mode of a 0.22 mum thick silicon slab waveguide with a surface grating implemented in a guided mode resonance configuration. Due to the strong overlap of the evanescent field of the waveguide mode with a molecular layer attached to the surface, these sensors exhibit high sensitivity, while their fabrication and packaging requirements are modest. Experimentally, we demonstrate a resonance wavelength shift of approximately 1 nm when a monolayer of the protein streptavidin is attached to the surface, in good agreement with calculations based on rigorous coupled wave analysis. In our current optical setup this shift corresponds to an estimated limit of detection of 0.2% of a monolayer of streptavidin.

MeSH terms

  • Biosensing Techniques / instrumentation*
  • Computer-Aided Design
  • Equipment Design
  • Equipment Failure Analysis
  • Light
  • Molecular Probe Techniques / instrumentation*
  • Refractometry / instrumentation*
  • Reproducibility of Results
  • Scattering, Radiation
  • Sensitivity and Specificity
  • Silicon / chemistry*
  • Silicon / radiation effects
  • Surface Plasmon Resonance / instrumentation*
  • Transducers*

Substances

  • Silicon