Monodisperse ethanol droplets 2.4 microm and water droplets 4.5 microm in diameter have been produced in ultrasonic atomization using 1.5- and 1.0-MHz microelectromechanical system (MEMS)-based silicon nozzles, respectively. The 1.5- and 1.0-MHz nozzles, each consisting of 3 Fourier horns in resonance, measured 1.20 cm x 0.15 cm x .11 cm and 1.79 cm x 0.21 cm x 0.11 cm, respectively, required electrical drive power as low as 0.25 W and could accommodate flow rates as high as 350 microl/min. As the liquid issues from the nozzle tip that vibrates longitudinally at the nozzle resonance frequency, a liquid film is maintained on the end face of the nozzle tip and standing capillary waves are formed on the free surface of the liquid film when the tip vibration amplitude exceeds a critical value due to Faraday instability. Temporal instability of the standing capillary waves, treated in terms of the unstable solutions (namely, time-dependant function with a positive Floquet exponent) to the corresponding Mathieu differential equation, is shown to be the underlying mechanism for atomization and production of such monodisperse droplets. The experimental results of nozzle resonance and atomization frequencies, droplet diameter, and critical vibration amplitude are all in excellent agreement with the predictions of the 3-D finite element simulation and the theory of Faraday instability responsible for atomization.