Sub-25-nm laboratory x-ray microscopy using a compound Fresnel zone plate

Opt Lett. 2009 Sep 1;34(17):2631-3. doi: 10.1364/OL.34.002631.

Abstract

Improving the resolution in x-ray microscopes is of high priority to enable future applications in nanoscience. However, high-resolution zone-plate optics often have low efficiency, which makes implementation in laboratory microscopes difficult. We present a laboratory x-ray microscope based on a compound zone plate. The compound zone plate utilizes multiple diffraction orders to achieve high resolution while maintaining reasonable efficiency. We analyze the illumination conditions necessary for this type of optics in order to suppress stray light and demonstrate microscopic imaging resolving 25 nm features.

Publication types

  • Research Support, Non-U.S. Gov't

MeSH terms

  • Algorithms
  • Equipment Design / instrumentation*
  • Equipment Design / methods
  • Image Processing, Computer-Assisted
  • Microscopy / instrumentation*
  • Microscopy / methods
  • Optical Devices
  • Optics and Photonics*
  • Photons
  • X-Ray Diffraction
  • X-Rays