Optical monitoring and real time admittance loci calculation through polarization interferometer

Opt Express. 2007 Dec 24;15(26):17536-41. doi: 10.1364/oe.15.017536.

Abstract

A simple, low coherence, vibration insensitive, polarization Fizeau interferometer is employed in this novel optical monitoring system proposed to extract the temporal phase change of the reflection coefficient of the growing film stacks. This system can directly detect fluctuating reflection coefficient and obtain the corresponding optical admittance of the growing film in real time.

Publication types

  • Research Support, Non-U.S. Gov't

MeSH terms

  • Computer-Aided Design
  • Equipment Design
  • Equipment Failure Analysis
  • Interferometry / instrumentation*
  • Light
  • Materials Testing / methods*
  • Membranes, Artificial*
  • Refractometry / instrumentation*
  • Reproducibility of Results
  • Scattering, Radiation
  • Sensitivity and Specificity

Substances

  • Membranes, Artificial