TiO(2) nanowires were fabricated by annealing TiO(2) nanoparticles on silicon substrate at 1000 degrees C in air. When a polystyrene nanosphere monolayer was used as a template to separate the TiO(2) nanoparticles, they could more easily react with the silicon substrate to form Ti(5)Si(3). The TiO(2) nanowires were formed upon further oxidation of Ti(5)Si(3). The diameters and lengths of TiO(2) nanowires were 30-80 nm and 1-3 microm, respectively. The nanowires had a rutile structure with the growth direction [112]. It is believed that the formation of TiO(2) nanowires involved a precipitation process in the mixture of SiO(2) and TiO(2). The nanowires show different photoluminescence behavior from that of the powder.