Straight single-line-defect photonic crystal (PC) waveguides on GaAs slabs with lengths of 1, 4, and 10 mm have been fabricated. By controlling the Al content of a sacrificial AlGaAs clad layer and the wet etching duration, a PC core layer with a very smooth surface was obtained. Atomic force microscope images indicate that the roughness on the top surface is less than 1 nm. An extremely low propagation loss of 0.76 dB/mm for the GaAs-based PC waveguide was achieved.