Magnetic force driven six degree-of-freedom active vibration isolation system using a phase compensated velocity sensor

Yongdae Kim; Sangyoo Kim; Kyihwan Park

doi:10.1063/1.3117462

Magnetic force driven six degree-of-freedom active vibration isolation system using a phase compensated velocity sensor

Rev Sci Instrum. 2009 Apr;80(4):045108. doi: 10.1063/1.3117462.

Authors

Yongdae Kim¹, Sangyoo Kim, Kyihwan Park

Affiliation

¹ Department of Mechatronics, Gwangju Institute of Science and Technology, 1 Oryong-dong, Buk-gu, Gwangju 500-712, Republic of Korea.

PMID: 19405692
DOI: 10.1063/1.3117462

Abstract

A six-axis active vibration isolation system (AVIS) is developed using voice coil actuators. Point contact configuration is employed to have an easy assembly of eight voice coil actuators to an upper and a base plates. The velocity sensor, using an electromagnetic principle that is commonly used in the vibration control, is investigated since its phase lead characteristic causes an instability problem for a low frequency vibration. The performances of the AVIS are investigated in the frequency domain and finally validated by comparing with the passive isolation system using the atomic force microscope images.