Laser Doppler distance sensor using phase evaluation

Opt Express. 2009 Feb 16;17(4):2611-22. doi: 10.1364/oe.17.002611.

Abstract

This paper presents a novel optical sensor which allows simultaneous measurements of axial position and tangential velocity of moving solid state objects. An extended laser Doppler velocimeter setup is used with two slightly tilted interference fringe systems. The distance to a solid state surface can be determined via a phase evaluation. The phase laser Doppler distance sensor offers a distance resolution of 150 nm and a total position uncertainty below 1 microm. Compared to conventional measurement techniques, such as triangulation, the distance resolution is independent of the lateral surface velocity. This advantage enables precise distance and shape measurements of fast rotating surfaces.

Publication types

  • Evaluation Study
  • Research Support, Non-U.S. Gov't

MeSH terms

  • Computer-Aided Design*
  • Equipment Design
  • Equipment Failure Analysis
  • Laser-Doppler Flowmetry / instrumentation*
  • Laser-Doppler Flowmetry / methods
  • Reproducibility of Results
  • Sensitivity and Specificity
  • Transducers*