Nanomechanical mass sensor for spatially resolved ultrasensitive monitoring of deposition rates in stencil lithography

Small. 2009 Feb;5(2):176-80. doi: 10.1002/smll.200800699.
No abstract available

Publication types

  • Research Support, Non-U.S. Gov't

MeSH terms

  • Calibration
  • Equipment Design
  • Metals / chemistry
  • Nanoparticles / chemistry
  • Nanotechnology / methods*
  • Nanowires / chemistry*
  • Nanowires / ultrastructure*
  • Oscillometry
  • Oxides / chemistry
  • Surface Properties

Substances

  • Metals
  • Oxides