Spectroscopic evaluation of three different gratings used for a flat-field extreme ultraviolet spectrometer to monitor Delta n=1 transitions from medium-Z impurities in 10-30 A

Rev Sci Instrum. 2008 Oct;79(10):10F537. doi: 10.1063/1.2953678.

Abstract

Spectral characteristics of varied line spacing 2400 grooves/mm gratings used for a flat-field extreme ultraviolet spectrometer have been evaluated to monitor Delta n=1 (n=2-3) transitions from medium-Z impurities in 10-30 A, where many spectral lines from metallic impurities closely exist. For this purpose emission spectra of the Delta n=1 transitions from partially L-shell-ionized Ti and Fe have been measured in large helical device. At first, a ruled and a holographic grating were utilized for the comparative study. Both gratings suppressed higher order light effectively but spectral sensitivity was much higher for the holographic grating. The ruled grating, however, attained better spectral resolution (0.083 A at 18.97 A) in the 10-100 A range compared to that (0.130 A) of the holographic grating. After that a recently developed new holographic grating with different laminar shapes and line spacings has attempted to improve the spectral resolution. As a result, it has considerably improved the spectral resolution in the 10-30 A range, i.e., approximately 0.090 A. However, it is found that the experimentally obtained spectral resolution is quit poor compared to the computationally simulated one, suggesting a technical difficulty in manufacturing exactly the varied line spacing of the holographic grating at such a short wavelength range.