High-resolution microspectrometer with an aberration-correcting planar grating

Appl Opt. 2008 Dec 1;47(34):6442-7. doi: 10.1364/ao.47.006442.

Abstract

A concept for a highly miniaturized spectrometer featuring a two-component design is presented. The first component is a planar chip that integrates an input slit and aberration-correcting diffraction grating with an image sensor and is fabricated using microelectromechanical systems (MEMS) technologies. Due to the fabrication in a simple MEMS batch process the essential elements of the spectrometer are automatically aligned, and a low fabrication cost per device can be achieved. The second component is a spherical mirror, which is the only external part. The optimized grating structure compensates for aberrations within the spectrometer operating range, resulting in a diffraction-limited performance of the spectrometer optics. The prototype of the device has been fabricated and characterized. It takes a volume of 0.5 cm(3) and provides a FWHM spectral resolution of 0.7 nm over a 350 nm bandwidth from 420 nm to 770 nm combined with an etendue of 7.4x10(-5) mm(2) sr.

Publication types

  • Research Support, Non-U.S. Gov't

MeSH terms

  • Equipment Design
  • Glass
  • Image Processing, Computer-Assisted
  • Microscopy, Electron, Scanning
  • Miniaturization
  • Models, Theoretical
  • Neon
  • Optics and Photonics
  • Refractometry / instrumentation*
  • Silicon
  • Spectrum Analysis / instrumentation*

Substances

  • Neon
  • Silicon