Laser micro/nano fabrication in glass with tunable-focus particle lens array

Opt Express. 2008 Nov 24;16(24):19706-11. doi: 10.1364/oe.16.019706.

Abstract

Based on medium-tuned optical field enhancement effect around a self-assembled particle-lens array (PLA) irradiated with a femtosecond (fs) laser source, we demonstrated that high-precision periodical array of micro/nano-structures can be readily fabricated on glass surface or inside glass in large areas in parallel without any cracks or debris. The technique has potential for rapid fabrication of three-dimensional structures in multiple layers inside glass.

Publication types

  • Research Support, Non-U.S. Gov't