An optical technique for the enhancement of fluorescence detection sensitivity on planar samples is presented. Such a technique is based on the simultaneous optimization of excitation and light collection by properly combining interference and reflectance from the sample holder. Comparative tests have been performed in microarray applications, by evaluating the proposed solution against commercial glass-based devices, using popular labeling dyes, such as Cy3 and Cy5. The proposed technique is implemented on a substrate built with standard silicon technology and is therefore well suited for integrated micro total analysis systems (microTAS) applications.