Integrated optical sensor using a liquid-core waveguide in a Mach-Zehnder interferometer

Opt Express. 2008 Oct 27;16(22):18164-72. doi: 10.1364/oe.16.018164.

Abstract

We demonstrate experimentally an optical sensor based on a monolithically integrated Mach-Zehnder interferometer comprising a liquid-core waveguide in one of the optical paths. The device is fabricated with a technique for self-forming microchannels in silica-on-silicon using standard photolithography and deposition processes. Refractometry with a resolution of better than 4x10(-6) is demonstrated using the thermo-optic effect of the liquid medium to vary its refractive index. The polarization dependence of the device response is analyzed.