Dichroic rugate filters based on birefringent porous silicon

Opt Express. 2008 Sep 29;16(20):15531-9. doi: 10.1364/oe.16.015531.

Abstract

Rugate filters made of anisotropically nanostructured birefringent silicon have been fabricated and studied by polarization-resolved transmission measurements. Electrochemical etching of a (110) oriented Si wafer results in porous silicon layers which exhibit a strong in-plane birefringence. We demonstrate that a sinusoidal refractive index variation of birefringent porous silicon combined with index-matching layers and apodization results in a dichroic rugate filter having a stop-band dependent on the polarization direction of the incident light without higher-order harmonics and sidelobes. We also demonstrate that the combination of different dichroic rugate filters allow us to realize filters with more complex properties in a single preparation step.

Publication types

  • Research Support, Non-U.S. Gov't

MeSH terms

  • Anisotropy
  • Computers
  • Electrochemistry / methods
  • Equipment Design
  • Filtration / instrumentation
  • Light
  • Microscopy, Electron, Transmission
  • Models, Statistical
  • Optics and Photonics*
  • Silicon / chemistry

Substances

  • Silicon