A miniature effusion cell for the vacuum deposition of organic solids with low vapor pressures in surface science studies

Jun Yoshinobu; Kozo Mukai; Tetsuo Katayama

doi:10.1063/1.2960562

A miniature effusion cell for the vacuum deposition of organic solids with low vapor pressures in surface science studies

Rev Sci Instrum. 2008 Jul;79(7):076107. doi: 10.1063/1.2960562.

Authors

Jun Yoshinobu¹, Kozo Mukai, Tetsuo Katayama

Affiliation

¹ The Institute for Solid State Physics, The University of Tokyo, 5-1-5 Kashiwanoha, Kashiwa, Chiba, Japan. yoshinobu@issp.u-tokyo.ac.jp

PMID: 18681744
DOI: 10.1063/1.2960562

Abstract

A miniature effusion cell for the vacuum deposition of volatile organic solids with low vapor pressures has been fabricated and used in surface science studies. The effusion cell is designed to operate at up to 200 degrees C under ultrahigh vacuum (UHV) conditions. The size of this cell is so small that it is attached to the top of a transfer rod and can be introduced from a subchamber into a main UHV chamber (retrievable). In addition, the small heat capacity of this cell means rapid heating and cooling rates. The advantages of this evaporator are its simplicity of design and ease of fabrication, assembly, and operation.