A voice coil actuator driven active vibration isolation system with the consideration of flexible modes

Rev Sci Instrum. 2008 Jun;79(6):065106. doi: 10.1063/1.2930810.

Abstract

We develop a four-mount active vibration isolation system (AVIS) using voice coil actuators. The flexible body modes in the upper plate of the AVIS can cause an instability problem due to control signal whose frequency is close to the resonant frequency of the flexible modes. The loop shaping technique is applied to reduce the amplitude of the control signal. We investigate the performances of the active vibration isolation system proposed in the word in the time domain and frequency domain by comparing to the passive isolation system.