Floating tip nanolithography

Nano Lett. 2008 Jul;8(7):2017-22. doi: 10.1021/nl801203c. Epub 2008 Jun 19.

Abstract

We demonstrate noncontact, high quality surface modification of soft and hard materials with spatial resolution of approximately 20 nm. The nanowriting is based on the interaction between the surface and the tip of a standard atomic force microscope illuminated by a focused femtosecond laser beam and hovering (at ambient conditions) 1-4 nanometers above the surface without touching it. Field enhancement at the tip-sample gap or high tip temperature are identified as the causes of material ablation.