In situ lift-out: steps to improve yield and a comparison with other FIB TEM sample preparation techniques

R M Langford; M Rogers

doi:10.1016/j.micron.2008.02.006

In situ lift-out: steps to improve yield and a comparison with other FIB TEM sample preparation techniques

Micron. 2008 Dec;39(8):1325-30. doi: 10.1016/j.micron.2008.02.006. Epub 2008 Feb 19.

Authors

R M Langford¹, M Rogers

Affiliation

¹ Materials Science Centre, University of Manchester, Manchester M1 7HS, UK. richard.langford@manchester.ac.uk

PMID: 18555690
DOI: 10.1016/j.micron.2008.02.006

Abstract

Steps to improve the success yield of the in situ lift-out technique are presented. These include tapping the plinth of the system and monitoring the grounding current to check the lift-out needle is fixed to the material being removed. In addition, the relative success yields and the time to prepare a TEM lamella for the three main FIB methods are discussed and compared.

Publication types

Comparative Study
Research Support, Non-U.S. Gov't

MeSH terms

Microscopy, Electron, Transmission / methods*