Optical characterization of photonic crystal slabs using orthogonally oriented polarization filters

Opt Express. 2008 May 12;16(10):7153-60. doi: 10.1364/oe.16.007153.

Abstract

We present an experimental method for direct analysis of guided-mode resonances in photonic crystal slab structures using transmission measurements. By positioning the photonic crystal slab between orthogonally oriented polarization filters light transmission is suppressed except for the guided-mode resonances. Angle resolved transmission measurements with crossed polarizers are performed to obtain the band structure around the Gamma-point. Results are compared to mode simulations. Spatially resolved measurements in a confocal microscope setup are used for homogeneity characterizations. Stitching errors and inhomogeneities in exposure dose down to 1.3% in photonic crystal slabs fabricated by electron beam lithography are observed using this method.

Publication types

  • Research Support, Non-U.S. Gov't

MeSH terms

  • Crystallization / instrumentation
  • Electrons
  • Equipment Design
  • Light
  • Microscopy
  • Microscopy, Confocal / methods*
  • Nanoparticles
  • Nanostructures / chemistry
  • Nanotechnology / methods
  • Optics and Photonics*
  • Photons
  • Refraction, Ocular