High efficiency silicon nitride surface grating couplers

Opt Express. 2008 Jan 7;16(1):328-33. doi: 10.1364/oe.16.000328.

Abstract

High efficiency surface grating couplers for silicon nitride waveguides have been designed, fabricated, and characterized. Coupling efficiencies exceeding 60 % are reported at a wavelength of 1.31 mum, as well as angular and wavelength -3 dB tolerances of 4 degrees and 50 nm, respectively. When the wavelength is increased from 1310 nm to 1450 nm the coupling efficiency progressively decreases but remains above 20 % at 1450 nm. The influence of the duty ratio of the grating has also been investigated: maximum coupling efficiency was obtained at 50 % duty ratio.

Publication types

  • Research Support, Non-U.S. Gov't

MeSH terms

  • Computer Simulation
  • Computer-Aided Design*
  • Equipment Design
  • Equipment Failure Analysis
  • Models, Theoretical*
  • Refractometry / instrumentation*
  • Refractometry / methods
  • Silicon Compounds / chemistry*
  • Transducers*

Substances

  • Silicon Compounds
  • silicon nitride