The construction with biomolecules and their manipulation represent a key step for developing new miniaturized structures. Such micro or nanometer systems promise a variety of novel features. Dielectrophoresis (DEP) is a powerful tool for trapping and orienting individual molecules in microelectrode arrangements, and was demonstrated to be applicable to DNA. This relatively rigid biomolecule could (after defined immobilization) act as template for further modifications and functionalizations, e.g. metallization. Parameters of the DEP process were adapted to the given electrode layout and for trapping a few or even a single DNA strand. Characterization with atomic force microscopy (AFM) extends the standard method of fluorescence imaging by resolving the resulting structures with single molecule resolution.