Non-aqueous routes to metal oxide thin films by atomic layer deposition
Angew Chem Int Ed Engl
.
2008;47(19):3592-5.
doi: 10.1002/anie.200705550.
Authors
Erwan Rauwel
1
,
Guylhaine Clavel
,
Marc-Georg Willinger
,
Protima Rauwel
,
Nicola Pinna
Affiliation
1
Department of Chemistry, CICECO, University of Aveiro, 3810-193 Aveiro, Portugal.
PMID:
18381608
DOI:
10.1002/anie.200705550
No abstract available