Spatial-mode control of vertical-cavity lasers with micromirrors fabricated and replicated in semiconductor materials

F Nikolajeff; T A Ballen; J R Leger; A Gopinath; T C Lee; R C Williams

doi:10.1364/ao.38.003030

Spatial-mode control of vertical-cavity lasers with micromirrors fabricated and replicated in semiconductor materials

Appl Opt. 1999 May 10;38(14):3030-8. doi: 10.1364/ao.38.003030.

Authors

F Nikolajeff¹, T A Ballen, J R Leger, A Gopinath, T C Lee, R C Williams

Affiliation

¹ Department of Electrical and Computer Engineering, University of Minnesota, Minneapolis, Minnesota 55455, USA. fredrik.nikolajeff@angstrom.uu.se

PMID: 18319888
DOI: 10.1364/ao.38.003030

Abstract

Micromirrors were fabricated in gallium phosphide by mass transport to provide spatial-mode control of vertical-cavity surface-emitting lasers (VCSEL's). The concave mirrors were used in an external-cavity configuration to provide spatial filtering in the far field. Single-mode cw lasing was demonstrated in 15-microm-diameter VCSEL's with currents as high as 6 times threshold. The fabrication process was extended to micromirrors in gallium arsenide by use of a replication and dry-etch transfer process.