Pd nanoparticles of well-defined shapes with face centered cubic structure were grown electrochemically on silicon substrates with high degree of reproducibility. As direct application of these electrochemically grown Pd nanostructures they have been used as catalyst for the growth of multi wall carbon nanotube (MWCNT). It is observed that the MWCNTs are filled with a Pd based material during growth by microwave plasma enhanced chemical vapor deposition (MPECVD) technique. High-resolution transmission electron microscopy, used to study the material inside MWCNT suggests the formation of PdH0.649 or Pd2Si during the growth of carbon nanotube. Raman spectroscopy has been used to study the structure of the MPECVD grown carbon nanotubes.