Replication of continuous-relief diffractive optical elements by conventional compact disc injection-molding techniques

Appl Opt. 1997 Jul 10;36(20):4655-9. doi: 10.1364/ao.36.004655.

Abstract

Continuous-relief diffractive optical elements have been replicated by use of conventional compact disc injection-molding techniques. Two continuous-relief microstructures, a blazed grating and a fan-out element, were chosen to evaluate the replication process. Original elements were fabricated by direct-write electron-beam lithography. Optical measurements and atomic force microscopy were used for investigating the replication fidelity.