Scanning probe lithography of polymers: tailoring morphology and functionality at the nanometer scale

Scanning. 2008 Mar-Apr;30(2):172-83. doi: 10.1002/sca.20084.

Abstract

This article reviews the patterning of the polymer via scanning probe lithography (SPL). Several different lithographies are characterized by the source of the patterned material, whether a mechanical, electrical, or thermal field is used, and whether the lithography modifies morphology, functionality, or both. The merits of the different strategies are discussed with respect to the fabrication goals.