Portable x-ray fluorescence spectrometer for coating thickness measurement

Alain Carapelle; Karl Fleury-Frenette; Jean-Paul Collette; Henri-Pierre Garnir; Philippe Harlet

doi:10.1063/1.2822613

Portable x-ray fluorescence spectrometer for coating thickness measurement

Rev Sci Instrum. 2007 Dec;78(12):123109. doi: 10.1063/1.2822613.

Authors

Alain Carapelle¹, Karl Fleury-Frenette, Jean-Paul Collette, Henri-Pierre Garnir, Philippe Harlet

Affiliation

¹ Centre Spatial de Liège, University of Liège, Avenue de Pre-Ally, Liege Science Park, 4031 Angleur, Belgium. a.carapelle@ulg.be

PMID: 18163722
DOI: 10.1063/1.2822613

Abstract

A handheld x-ray spectrometer has been realized and tested. The purpose of the device is to measure the thickness of coated samples in the range of 1-1500 nm in an industrial environment. Accuracy of approximately 3% has been achieved in this range with a measurement time of 1 min. Automated software has been implemented to allow utilization by a nonspecialist operator. An automated calibration procedure, based on measurements of reference samples, is used.

MeSH terms

Coated Materials, Biocompatible / chemistry*
Equipment Design
Equipment Failure Analysis
Materials Testing / instrumentation*
Miniaturization
Reproducibility of Results
Sensitivity and Specificity
Spectrometry, X-Ray Emission / instrumentation*

Substances

Coated Materials, Biocompatible