Sub-10 nm thick microporous membranes made by plasma-defined atomic layer deposition of a bridged silsesquioxane precursor

J Am Chem Soc. 2007 Dec 19;129(50):15446-7. doi: 10.1021/ja0773756. Epub 2007 Nov 23.
No abstract available

Publication types

  • Research Support, N.I.H., Extramural
  • Research Support, U.S. Gov't, Non-P.H.S.

MeSH terms

  • Gases / chemistry
  • Microscopy, Electron, Transmission
  • Nanostructures / chemistry*
  • Nanostructures / ultrastructure*
  • Organosilicon Compounds / chemistry*
  • Porosity

Substances

  • Gases
  • Organosilicon Compounds