A chemically amplified fullerene-derivative molecular electron-beam resist

Small. 2007 Dec;3(12):2076-80. doi: 10.1002/smll.200700324.

Abstract

Current lithographic resists depend on large polymeric materials, which are starting to limit further improvements in line-width roughness and feature size. Fullerene molecular resists use much smaller molecules to avoid this problem. However, such resists have poor radiation sensitivity. Chemical amplification of a fullerene derivative using an epoxy crosslinker and a photoacid generator is demonstrated. The sensitivity of the material is increased by two orders of magnitude, and 20-nm line widths are patterned.

Publication types

  • Research Support, Non-U.S. Gov't

MeSH terms

  • Cross-Linking Reagents / chemistry
  • Electrons*
  • Fullerenes / chemistry*

Substances

  • Cross-Linking Reagents
  • Fullerenes