Correlation of reaction sites during the chlorine extraction by hydrogen atom from ClSi(100)-2x1

Ming-Feng Hsieh; Jen-Yang Chung; Deng-Sung Lin; Shiow-Fon Tsay

doi:10.1063/1.2752502

Correlation of reaction sites during the chlorine extraction by hydrogen atom from ClSi(100)-2x1

J Chem Phys. 2007 Jul 21;127(3):034708. doi: 10.1063/1.2752502.

Authors

Ming-Feng Hsieh¹, Jen-Yang Chung, Deng-Sung Lin, Shiow-Fon Tsay

Affiliation

¹ Institute of Physics, National Chiao-Tung University, 1001 Ta-Hsueh Road, Hsinchu 300, Taiwan.

PMID: 17655456
DOI: 10.1063/1.2752502

Abstract

The Cl abstraction by gas-phase H atoms from a Cl-terminated Si(100) surface was investigated by scanning tunneling microscopy (STM), high-resolution core level photoemission spectroscopy, and computer simulation. The core level measurements indicate that some additional reactions occur besides the removal of Cl. The STM images show that the Cl-extracted sites disperse randomly in the initial phase of the reaction, but form small clusters as more Cl is removed, indicating a correlation between Cl-extracted sites. These results suggest that the hot-atom process may occur during the atom-adatom collision.