With ultrasonic irradiation as assistance, highly dispersed MoO(3) nanospheres were synthesized using silane coupling agent 3-mercaptopropyltrimethoxysilane HS-(CH(2))(3)Si(OCH(3))(3) (MPTS) as figuration agent. The results of X-ray powder diffractometer (XRD) showed that the precursor was hexagonal molybdenum oxide hydrate (MoO(3).0.55H(2)O). It was converted into orthorhombic MoO(3) after annealed at 400 degrees C for 2h. Transmission electron microscopy (TEM) showed that MoO(3).0.55H(2)O and MoO(3) nanoparticles were spherical with particle-size distribution of ca. 30-80 nm and 25-75 nm, respectively. Results indicated that MPTS and ultrasonic irradiation played important role in formation of highly dispersed MoO(3) nanospheres. X-ray photoelectron spectroscopy (XPS) was also adopted to confirm the growth mechanism. The possible cause of formation was based on dispersion function of ultrasonic irradiation and figuration of MPTS.