AES investigation of inhomogenous metal-insulator samples

Microsc Microanal. 2005 Dec;11(6):567-71. doi: 10.1017/S1431927605050658.

Abstract

In this article, the secondary electron-emission properties of both vertically and laterally inhomogeneous samples are discussed. To study the effect of surface coverage, the total electron-emission yield of tungsten and niobium samples was measured as a function of primary electron energy and oxide thickness. A method is suggested to avoid charging difficulties during AES measurements of samples that consist of both metal and various insulator parts.

MeSH terms

  • Electrons
  • Metals / chemistry*
  • Microscopy, Electron / methods*
  • Niobium / chemistry*
  • Oxides
  • Reproducibility of Results
  • Surface Properties
  • Tungsten / chemistry*

Substances

  • Metals
  • Oxides
  • Niobium
  • Tungsten